В настоящее время STMicroelectronics — мировой лидер в производстве
МЭМС-акселерометров. Компания выпускает датчики на базе 200-мм
кремниевых пластин, что обеспечивает более низкую себестоимость, по
сравнению с конкурентами.
Акселерометры ST, в зависимости от модели, способны
измерять ускорение или вибрацию в одном или одновременно двух и трех
направлениях. Значение смещения измеряется и в зависимости от типа
выходного интерфейса преобразуется в аналоговый или цифровой выходной
сигнал. На рисунке ниже приведена функциональная схема и ключевые
характеристики двух групп датчиков с цифровым выходом.
Функциональная схема цифрового акселерометра от СТМ.
| Part Number |
General Description |
Sensing Axes |
Output Type |
Supply Voltage (V) min |
Supply Voltage (V) typ |
Supply Voltage (V) max |
Noise Density (µg/v Hz) |
Current Consumption (mA) typ |
Current Consumption (mA) (Low Power Mode) typ |
Current Consumption (mA) (Power Down Mode) typ |
| AIS1120SX |
MEMS acceleration sensor: single-axis for central airbag applications |
X |
Digital |
3.1 |
3.3 |
3.5 |
- |
4.5 |
- |
- |
| AIS1200PS |
MEMS acceleration sensor: single-axis with PSI5 point-to-point interface |
X, Y |
Digital |
5 |
- |
16 |
- |
4 |
- |
- |
| AIS2120SX |
Dual-axis hi-g accelerometer for airbags |
X, Y |
Digital |
3.1 |
3.3 |
3.5 |
- |
6 |
- |
- |
| AIS326DQ |
Digital output motion sensor for automotive applications low-power high performance 3-axes accelerometer |
X, Y, Z |
Digital |
3 |
3.3 |
3.6 |
- |
0.67 |
- |
0.002 |
| AIS328DQ |
High-performance ultra low-power 3-axis accelerometer for automotive applications |
X, Y, Z |
Digital |
2.4 |
3.3 |
3.6 |
218 |
0.25 |
- |
- |
| AIS3624DQ |
3-axis accelerometer for non-safety automotive applications |
X, Y, Z |
Digital |
2.4 |
3.3 |
3.6 |
- |
- |
- |
0.001 |
| H3LIS100DL |
MEMS motion sensor |
X, Y, Z |
Digital |
2.16 |
2.5 |
3.6 |
- |
- |
0.3 |
0.001 |
| H3LIS200DL |
MEMS motion sensor |
X, Y, Z |
Digital |
2.16 |
2.5 |
3.6 |
- |
- |
0.3 |
0.001 |
| H3LIS331DL |
MEMS motion sensor: low power high g 3-axis digital accelerometer |
X, Y, Z |
Digital |
2.16 |
2.5 |
3.6 |
- |
0.3 |
0.3 |
- |
| IIS2DH |
MEMS digital output motion sensor: ultra low-power high performance 3-axes accelerometer |
X, Y, Z |
Digital |
1.71 |
2.5 |
3.6 |
- |
0.011 |
0.002 |
5.0E-4 |
| IIS328DQ |
High Performance Low power 3 axis accelerometer for industrial applications |
X, Y, Z |
Digital |
2.4 |
3.3 |
3.6 |
218 |
- |
0.25 |
0.001 |
| LIS2DE |
MEMS digital output motion sensor ultra low-power high performance 3-axes "femto" accelerometer |
X, Y, Z |
Digital |
1.71 |
2.5 |
3.6 |
- |
0.011 |
0.006 |
5.0E-4 |
| LIS2DE12 |
MEMS digital output motion sensor: ultra low-power high performance 3-axes femto accelerometer |
X, Y, Z |
Digital |
1.71 |
2.5 |
3.6 |
- |
0.011 |
0.002 |
5.0E-4 |
| LIS2DH |
MEMS digital output motion sensor: ultra low-power high performance 3-axes femto accelerometer |
X, Y, Z |
Digital |
1.71 |
2.5 |
3.6 |
- |
0.011 |
0.002 |
5.0E-4 |
| LIS2DH12 |
MEMS digital output motion sensor: ultra low-power high performance 3-axes femto accelerometer |
X, Y, Z |
Digital |
1.71 |
2.5 |
3.6 |
- |
0.011 |
0.002 |
5.0E-4 |
| LIS2DS12 |
MEMS digital output motion sensor ultra low-power high performance 3-axes "pico" accelerometer |
X, Y, Z |
Digital |
1.62 |
1.98 |
1.8 |
120 |
0.018 |
0.006 |
5.0E-4 |
| LIS2HH12 |
MEMS digital output motion sensor: ultra low-power high performance 3-axes "pico" accelerometer |
X, Y, Z |
Digital |
1.71 |
- |
3.6 |
- |
0.018 |
- |
5.0E-4 |
| LIS302DL |
MEMS motion sensor 3-axis ±2g/±8g smart digital output 'piccolo' accelerometer |
X, Y, Z |
Digital |
2.16 |
2.5 |
3.6 |
- |
0.3 |
- |
0.001 |
| LIS331DLH |
MEMS motion sensor: Ultra low power high performance 3-axis digital accelerometer |
X, Y, Z |
Digital |
2.16 |
2.5 |
3.6 |
218 |
0.25 |
- |
- |
| LIS331DLM |
MEMS motion sensor: Ultra low power 8bit 3-axis digital accelerometer |
X, Y, Z |
Digital |
2.16 |
2.5 |
3.6 |
- |
0.25 |
0.01 |
0.001 |
| LIS331HH |
MEMS digital output motion sensor:ultra low-power high full-scale 3-axes nano accelerometer |
X, Y, Z |
Digital |
2.16 |
2.5 |
3.6 |
650 |
0.25 |
0.01 |
0.001 |
| LIS332AR |
MEMS motion sensor 3-axis ±2 g analog-output ultracompact accelerometer |
X, Y, Z |
Analog |
2.16 |
3 |
3.6 |
100 |
0.3 |
- |
0.001 |
| LIS33DE |
MEMS motion sensor 3-axis - ± 2g/± 8g smart digital output nano accelerometer |
X, Y, Z |
Digital |
2.16 |
2.5 |
3.6 |
- |
0.3 |
- |
0.001 |
| LIS344ALH |
MEMS inertial sensor high performance 3-axis ±2/ ±6g ultracompact linear accelerometer |
X, Y, Z |
Analog |
2.4 |
3.3 |
3.6 |
50 |
0.68 |
- |
- |
| LIS35DE |
MEMS motion sensor 3-axis - ± 2g/± 8g smart digital output piccolo accelerometer |
X, Y, Z |
Digital |
2.16 |
2.5 |
3.6 |
- |
0.3 |
- |
0.001 |
| LIS3DE |
MEMS digital output motion sensor ultra low-power high performance 3-axes "nano" accelerometer |
X, Y, Z |
Digital |
1.71 |
2.5 |
3.6 |
- |
0.011 |
0.006 |
5.0E-4 |
| LIS3DH |
MEMS digital output motion sensor ultra low-power high performance 3-axes "nano" accelerometer |
X, Y, Z |
Digital |
1.71 |
2.5 |
3.6 |
220 |
0.011 |
0.002 |
5.0E-4 |
| LIS3DSH |
MEMS digital output motion sensor: ultra low-power high performance 3-axes nano accelerometer |
X, Y, Z |
Digital |
1.71 |
2.5 |
3.6 |
150 |
0.25 |
0.01 |
0.002 |
| LIS3LV02DL |
Linear Accelerometer 3-Axis ±2g/ ±6g with SPI/I2C digital interface |
X, Y, Z |
Digital |
2.16 |
3.3 |
3.6 |
- |
0.65 |
- |
0.001 |
| MIS2DH |
MEMS digital output motion sensor: ultra low-power high performance 3-axes accelerometer |
X, Y, Z |
Digital |
1.71 |
2.5 |
3.6 |
- |
0.002 |
0.002 |
5.0E-4 |
